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RIE Systems

The RIE family consists of single or twin chamber systems.

Features:

• Turbomolecular pumping system for corrosive gases
• Chemical rotary vane pump, fomblin oil or dry compressing pump
• 13,56 MHz power supply with automatic matching network
• Process gas box with MFC
• Software control preprogrammed recipes. Service operation. Remote service control parameter
• Low maintenance costs. Low service costs. Easy upgrade

Accessories:

• Roots pumping system
• Ion milling source (RIBE)
• Electrostatic chuck up to Ø 200 mm
• Gas helium substrates cooling
• Laser and point detection

Applications:

• Semiconductor
• Microelectronic
• Electron-optics

Technical Data

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Privacy* Art. 13, D.Lgs. 196/2003.

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