A cassette-to-cassette load lock is connected to a transfer module from which samples can be moved up to the process chamber and is interconnected to an automated central chamber capable of handling multiple samples on each module, always maintaining vacuum.
The number and type of module depend on customer needs and process requirements. These are therefore systems designed and created to measure.
The reactive ion etching (RIE) system is an ion-assisted reactive method based on a combination of chemical and physical etching that allows the removal of isotropic and anisotropic material.
PECVD, which stands for Plasma-enhanced chemical vapor deposition, is a plasma-enhanced chemical thin film deposition process.
ALDAtomic Layer Deposition (ALD) is a technology that allows you to deposit high-density material, ensuring accurate uniformity.PLDPulsed laser deposition (PLD) is a deposition te...
From magnetron sources and cathode arc evaporation sources to power supplies: thanks to our vast experience in the production of vacuum systems, we offer the market the best components designed and ma...
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