Decorative coating solutions for industry
KSA Series 700-1300 V
Batch Reporting for Quality Assurance and system integration with CUSTOMER PRODUCTION AUTOMATION
Each equipment is provided with the following features:
- POLYCOLD WATER TRAP and/or back-streaming trap
- Dual Zone cooling: hot and cold water
- Kenosistec user-friendly V-See SOFTWARE that provides a wide range of Data Recording for traceability and process analysis.
- Exchangeable set of Shields for promoting an EASY and FAST CLEANNG.
- Carrousel tailored according to customer request
- MULTIPLE TECHNOLOGIES: Cathodic Arc, Sputtering (Planar Magnetrons, Rotatable Dual Magnetrons, HiPPo), PECVD (Capacitive or Inductively coupled), Plasma treatment.
- BIAS assistance
- Substrates heating
| SERIES | KSA 700 V | KSA 1000 V | KSA 1300 V |
| Max carrousel dimensions (*) | ø 750 mm h 900 mm | ø 1100 mm h 1200 mm | ø 1300 mm h 1650 mm |
*Scalable in height (up to twice the standard height)
Download the product Data Sheet
| DEPOSITION and ACTIVATION SOURCES | Cylindrical and planar Magnetron Sputtering Cathodic Arc Evaporation sources PECVD Sources |
| SUBSTRATE HOLDER | Carousel with double rotation for higher coating uniformity on 3D samples |
| SAMPLES CLEANING | Dedicated Power supply connected to the carousel for plasma cleaning |
| HEATING | Resistive elements – Infrared radiation |
- Special TROLLEY for QUICK LOAD/ UNLOAD of the exchangeable carrousel
- Extra set of SHIELDS for QUICK MAINTENANCE
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