The KSA 700-1300 V series, PVD systems for large production volumes
Each system is equipped with the following features:
- Polycold® cryogenic trap and / or back-streaming siphon
- Dual Zone Cooling: hot and cold water
- V-See software, made by Kenosistec and easy to use, allows you to record a wide range of data to track and analyse processes.
- set of interchangeable shields for quick and easy cleaning.
- carousel made to measure according to the customer's needs
- multiple technologies: Cathode Arc Evaporation (CAE), Sputtering (Planar Magnetron, Rotating Dual Magnetron, HiPPo), PECVD, Plasma treatment.
- Polarization for substrates (BIAS)
- Heating for substrates (samples)
The KSA series includes 3 types of systems, based on the size of the carousel:
- KSA 700 V, maximum dimensions of the carousel * ø 750 mm h 900 mm
- KSA 1000 V, maximum dimensions of the carousel * ø 1100 mm h 1200 mm
- KSA 1300 V, maximum dimensions of the carousel * ø 1300 mm h 1650 mm
* height to scale
Activation sources available:
- Sputtering Magnetron cylindrical and / or planar
- Cathode arc evaporation sources
- PECVD sources
- Sputtering source Hi.P.Po
The substrate holder consists of a carousel with double rotation to ensure greater uniformity of coating on 3D samples
For sample cleaning, the system is equipped with a dedicated power supply, connected to the carousel for effective plasma cleaning.
Additional components can be added to the system to facilitate its use:
- A special trolley to speed up the loading / unloading of the interchangeable carousel
- An extra set of shields for faster maintenance
- Viale delle scienze, 23, 20082 Binasco MI
- Tel +39 02 9055200